Synchrotron and Neutron Users' Group  
  

 
 
 

 
 

Applications

More Powerful Computers for the Information Age

Improved computational power comes from shrinking transistors to squeeze more of them into a microprocessor.  Extreme Ultraviolet (EUV) Lithography is the leading next generation technology to make those continued improvements possible.  The pioneering work done with synchrotron radiation has driven this technology forward toward commercialization.

euv lithography tool

EUV lithography exposure tool using
synchrotron radiation


 



 
Printed image showing 28 nm circuit lines in photoresist
   
 
             

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